发明名称 |
Method of direct bonding of crystals and crystal devices |
摘要 |
A method of directly bonding a crystal to a crystal includes the steps of mirror-polishing the surfaces of the crystals and then rinsing them with a cleaning material and then affecting a baking operation and then bonding them together and thereafter annealing them within a temperature range where crystal crystallization is not transited in phase so that a further strong bonding force is obtained. A crystal resonator is obtained where electrodes are oppositely established across a ply crystal blank with at least two sheets of crystal blanks having a desired cut angle and a desired thickness being directly bonded so that the respective crystal axes intersect at the desired angles. The ply crystal blank may have a central portion which is either thicker or thinner than a surrounding portion. A crystal oscillator including a crystal resonator having the above noted features may be fabricated and a temperature compensated crystal oscillator of either the analog or digital type may also be formed using such a crystal resonator. A crystal filter may also be formed using a ply crystal bank with at least two sheets of crystal blanks having a desired cut angle and a desired shape being directly bonded so that respective crystal axes intersect at the desired angles.
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申请公布号 |
US5319324(A) |
申请公布日期 |
1994.06.07 |
申请号 |
US19920955256 |
申请日期 |
1992.10.01 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SATOH, YUKI;HASHIMOTO, KOJI;ISHIZAKI, TOSHIO |
分类号 |
H03B5/32;H03H3/02;H03L1/02;(IPC1-7):H01L41/04;H01L41/107;H03H9/54 |
主分类号 |
H03B5/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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