发明名称 Method of direct bonding of crystals and crystal devices
摘要 A method of directly bonding a crystal to a crystal includes the steps of mirror-polishing the surfaces of the crystals and then rinsing them with a cleaning material and then affecting a baking operation and then bonding them together and thereafter annealing them within a temperature range where crystal crystallization is not transited in phase so that a further strong bonding force is obtained. A crystal resonator is obtained where electrodes are oppositely established across a ply crystal blank with at least two sheets of crystal blanks having a desired cut angle and a desired thickness being directly bonded so that the respective crystal axes intersect at the desired angles. The ply crystal blank may have a central portion which is either thicker or thinner than a surrounding portion. A crystal oscillator including a crystal resonator having the above noted features may be fabricated and a temperature compensated crystal oscillator of either the analog or digital type may also be formed using such a crystal resonator. A crystal filter may also be formed using a ply crystal bank with at least two sheets of crystal blanks having a desired cut angle and a desired shape being directly bonded so that respective crystal axes intersect at the desired angles.
申请公布号 US5319324(A) 申请公布日期 1994.06.07
申请号 US19920955256 申请日期 1992.10.01
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 SATOH, YUKI;HASHIMOTO, KOJI;ISHIZAKI, TOSHIO
分类号 H03B5/32;H03H3/02;H03L1/02;(IPC1-7):H01L41/04;H01L41/107;H03H9/54 主分类号 H03B5/32
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