<p>The carrier (1) has a carrier layer (2) and a functional element (4) that is designed as a drive unit (5), which consists of piezoelectric material. The carrier layer is designed in a laminar manner and consists of two flat sides (3, 7). The flat side (7) has a retaining unit (8) for detachable holding of laminar objects such as a substrate (9). The drive unit is connected with the flat side (3) of the carrier layer. Sensors (6) are connected with the flat side (3) of the carrier layer. An independent claim is also included for an imprint lithography method for formation of the micro or nano structures on a substrate.</p>
