| 发明名称 |
Volatile barium precursor and use of precursor in OMCVD process |
| 摘要 |
Novel volatile barium complexes are disclosed which are very stable and evaporate cleanly at elevated temperatures. Such complexes are highly suited for use as a barium source in OMCVD processes.
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| 申请公布号 |
US5319118(A) |
申请公布日期 |
1994.06.07 |
| 申请号 |
US19910779435 |
申请日期 |
1991.10.17 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
NORMAN, JOHN A. T.;MURATORE, BETH A.;DYER, PAUL N. |
| 分类号 |
C07C45/45;C07C49/12;C07C49/92;C23C16/40;(IPC1-7):C07F3/00 |
主分类号 |
C07C45/45 |
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