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经营范围
发明名称
Device for loading work pieces to and from a coating chamber.
摘要
申请公布号
EP0291690(B1)
申请公布日期
1994.06.01
申请号
EP19880105914
申请日期
1988.04.14
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
WALDE, MICHAEL;ZEJDA, JAROSLAV
分类号
C23C14/56;B65G49/07;H01L21/00;(IPC1-7):H01L21/68
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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