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发明名称
Method of manufacturing a silicon-on-isolator device using an improved encapsulation layer.
摘要
申请公布号
EP0376400(B1)
申请公布日期
1994.05.25
申请号
EP19890203281
申请日期
1989.12.21
申请人
N.V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
BAUMGART, HELMUT;MARTINEZ, ANDRE
分类号
H01L21/02;H01L21/20;H01L21/263;H01L21/84;H01L27/12;(IPC1-7):H01L21/20
主分类号
H01L21/02
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