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经营范围
发明名称
Vorrichtung mit einem Ausrichtungsgestell.
摘要
申请公布号
DE68911330(T2)
申请公布日期
1994.05.26
申请号
DE19896011330T
申请日期
1989.02.01
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA
发明人
NOMURA, TAKEHIKO C/O PATENT DIVISION, MINATO-KU TOKYO 105;SUZUKI, RYOICHI C/O PATENT DIVISION, MINATO-KU TOKYO 105
分类号
G03F7/20;H01L21/68;H05K13/08;(IPC1-7):H01L21/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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