| 摘要 |
<p>PURPOSE:To easily rearrange wafers in order as intended in a short time when transferring wafers stored in a carrier case to another carrier case. CONSTITUTION:An organization for wafers to be stored in order in an original carrier 1 and a target carrier 3 is programmed in a monitor 5 through a programming button 4. The first wafer 10 in the original carrier 1 is taken out by using the arm 8 of a robot 7 and transferred to the eighth position in the target carrier 3 as programmed. Such actions are repeated to complete the transfer of all wafers 10. It is thus possible to automatically rearrange wafers in order as intended, relieve wafers of pollution and improve handling efficiency.</p> |
