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发明名称
CLUSTER DEVICE
摘要
申请公布号
JPH06140492(A)
申请公布日期
1994.05.20
申请号
JP19920289767
申请日期
1992.10.28
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
MIYAJIMA YOSHIMASA;SHIRAI HIDENOBU
分类号
B65G49/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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