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发明名称
Halbleiterspeichervorrichtung und Verfahren zur Herstellung einer Halbleiterspeichervorrichtung
摘要
申请公布号
DE3940539(C2)
申请公布日期
1994.05.19
申请号
DE19893940539
申请日期
1989.12.07
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
YONEDA, MASAHIRO, ITAMI, HYOGO
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L27/108;H01L21/72;G11C11/404
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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