| 摘要 |
<p>PURPOSE:To establish an active matrix liquid crystal display device high in display quality and reliability and its production method by reducing the capacity of a MIM type element. CONSTITUTION:In a liquid crystal display panel of active matrix system, an exposure process is repeated for a photo-resist layer using masks of different patterns to form convergent sections 510 and 520 of less than 4mum in width on a lower layer side electrode layer 31 and an upper layer side electrode layer 33 of a MIM type nonlinear element 30. Because narrow areas 51 and 52 of 2 to 3mum in width are opposed to each other, the area of the opposed area 50 is 16mum<2> or below though they are formed by a 4mum rule.</p> |
