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发明名称
CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH06124897(A)
申请公布日期
1994.05.06
申请号
JP19920274078
申请日期
1992.10.13
申请人
RYODEN SEMICONDUCTOR SYST ENG KK;MITSUBISHI ELECTRIC CORP
发明人
DOI NOBUAKI;TSUTAHARA KOUICHIROU
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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