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发明名称
ION-IMPLANTATION DEVICE
摘要
申请公布号
JPH06124682(A)
申请公布日期
1994.05.06
申请号
JP19920294030
申请日期
1992.10.08
申请人
NISSIN ELECTRIC CO LTD
发明人
NUKAYAMA MASAAKI;ANDO YASUNORI;TATEMICHI JUNICHI
分类号
H01J27/16;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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