| 摘要 |
PURPOSE:To provide the optical waveguide element, such as optical modulator, used for optical communication, etc., which particularly lessens the coupling loss with optical fibers, enables the use of inexpensive glass for a base body, lessens the restriction on the semiconductors to be used and has excellent mass productivity. CONSTITUTION:This optical waveguide element has first, second branch optical waveguides 4, 5 formed by the refractive index difference from the refractive index of the glass base body 1 within a single crystal semiconductor substrate 2 which is joined to the glass base body 1 by using a low melting glass layer 8 or silicon or silicon compd. and has an electrooptical effect. Electric fields are impressed to these waveguides by electrodes 6, 7 to control the light passing the second branch optical waveguide which is one of these optical waveguides by the electrooptical effect. |
