PLASMA ETCHING DEVICE,申请号JP19920268885-传众专利搜索

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发明名称	PLASMA ETCHING DEVICE
摘要
申请公布号	JPH06119996(A)	申请公布日期	1994.04.28
申请号	JP19920268885	申请日期	1992.10.07
申请人	SUMITOMO METAL IND LTD	发明人	TANAKA MASAHIKO
分类号	H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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