| 摘要 |
A method and device for evaluating the quantities of adsorbed impurities in sample gas of ultra-high purity for various kinds of materials. After inert gas of ultra-high purity is supplied to a sample-gas pipe (16) through a purifier (1) (a first gas-supply source), the inside of said sample-gas pipe (16) is baked by heaters (19 to 21) (heating means). The inside of the sample-gas pipe (16) is kept in an atmosphere at specified temperature and then changeover valves (9, 10) are changed over from opening to closing or vice versa so that the sample gas of a specified concentration is supplied from a bomb (6) (a second gas-supply source) into the sample-gas pipe (16) until the quantities of adsorbed impurities reach saturation, in other words, from the time when sample gas flows into the pipe to that when a microanalyzer (25) detects said gas of said specified concentration. <IMAGE> |
