Process for forming deposited film for light-receiving member , light-receiving member produced by the process, deposited film forming apparatus, and method for cleaning deposited film forming apparatus.

摘要

A process for producing a light-receiving member comprising a substrate and a non-monocrystalline light-receiving layer provided on the substrate, which comprises forming at least a part of the light-receiving layer by decomposing a starting material gas introducing into a reaction chamber by means of an electromagnetic wave with a frequency of from 20 MHz to 450 MHz. <IMAGE>