发明名称 COOLING SYSTEM FOR INTEGRATED CIRCUIT
摘要 <p>PURPOSE:To provide the title cooling system for integrated circuit capable of effectively cooling down the integrated circuit as well as effectively avoiding the leakage of a refrigerant for cooling step. CONSTITUTION:The title cooling system for integrated circuit is provided with a bottomed cylindrical fixed piston 3 abutting against the integrated circuit wherein a bottomed part outer surface is mounted on a wiring substrate, a housing 8 containing and holding this fixed piston 3 and a nozzle 13 jetting a liquid refrigerant in the fixed piston 3 as well as the refrigerant flow path 16 exhausting the refrigerant jetted in the fixed piston 3 fixedly arranged in the housing 8.</p>
申请公布号 JPH06112384(A) 申请公布日期 1994.04.22
申请号 JP19920031634 申请日期 1992.01.22
申请人 NEC CORP 发明人 UMEZAWA KAZUHIKO
分类号 H01L23/473;H01L23/433;(IPC1-7):H01L23/473 主分类号 H01L23/473
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