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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH06111755(A)
申请公布日期
1994.04.22
申请号
JP19920281071
申请日期
1992.09.28
申请人
SONY CORP
发明人
HORIUCHI ATSUSHI
分类号
H01J37/08;H01J37/317;H01L21/265;H05H7/00;(IPC1-7):H01J37/317
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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