Verfahren zur Herstellung eines Films.,申请号DE19906007321-传众专利搜索

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发明名称	Verfahren zur Herstellung eines Films.
摘要
申请公布号	DE69007321(D1)	申请公布日期	1994.04.21
申请号	DE19906007321	申请日期	1990.03.30
申请人	CANON K.K., TOKIO/TOKYO, JP	发明人	OSADA, YOSHIYUKI, ATSUGI-SHI, KANAGAWA-KEN, JP;HANNA, JUN-ICHI, YOKOHAMA-SHI, KANAGAWA-KEN, JP
分类号	C30B25/00;C23C16/22;C23C16/24;C23C16/44;C23C16/452;C23C16/455;C23C16/46;C23C16/48;C23C16/52;H01L21/205;(IPC1-7):C23C16/44	主分类号	C30B25/00
代理机构		代理人
主权项
地址

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