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发明名称
摘要
申请公布号	JPH0630034(B2)	申请公布日期	1994.04.20
申请号	JP19880258712	申请日期	1988.10.13
申请人	NIPPON ELECTRIC CO	发明人	SUGIBAYASHI NAOHIKO
分类号	H01L27/04;G05F1/10;G05F1/618;G05F3/24;G11C11/407;H01L21/822;H03F1/00;(IPC1-7):G05F3/24	主分类号	H01L27/04
代理机构		代理人
主权项
地址

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