Methods for producing heterojunction bipolar transistors.

摘要

A method for producing a semiconductor device includes growing a collector layer (2), a base layer (3), and an emitter layer (4) on a substrate (1); forming an emitter electrode (5), a tungsten film (13), and a silicon film (14) serving as an etching stopper on a prescribed region of the emitter layer (4); etching the emitter layer (4) using above-described films (14,13) and electrode (5) as a mask to expose the base layer (3); forming side walls (7) on opposite side surfaces of the films (14,13), electrode (5), and layer (4); forming a zinc oxide layer (8) as an impurity diffusion source on the whole surface of the substrate and performing a diffusion to produce high impurity regions (9) in the base layer (3); removing the zinc oxide layer (8) by a wet etching using hydrofluoric acid as an etchant; depositing a base metal (11) on the whole surface of the substrate and removing an unnecessary portion of the base metal by ion milling to form base electrodes (111); selectively removing the silicon film (14); and forming a leading electrode (16) in contact with the tungsten film (13). Since the silicon film (14) is not etched by hydrofluoric acid when the zinc oxide layer (8) is removed, the emitter electrode (5) is not adversely affected by the ion milling for removing the base metal (11), resulting in an HBT with a reliable emitter electrode.