发明名称 |
Scanning tunneling microscope |
摘要 |
A scanning tunneling microscope is disclosed which includes a frame assembly having upper frame members coupled to lower frame members by an external vibration isolation structure, a sample carousel configured to receive at least one sample to be scanned, and a probe carousel configured to receive at least one probe module including a probe tip. The sample and probe carousels are coupled to the upper frame members and sample and probe actuators are provided to rotate the carousels. A positioning mechanism is used to maintain a scanning distance between the probe tip and the sample carousel. A control unit controls the overall operation of the actuators to rotate the carousels and the operation of the positioning mechanism to maintain the scanning distance. |
申请公布号 |
GB2262185(B) |
申请公布日期 |
1994.04.20 |
申请号 |
GB19920020717 |
申请日期 |
1992.10.01 |
申请人 |
* LK TECHNOLOGIES INC |
发明人 |
LARRY L * KESMODEL;MICHAEL W * KISER |
分类号 |
G01N23/00;G01Q10/02;G01Q10/04;G01Q30/08;G01Q30/10;G01Q30/18;G01Q60/16;G01Q70/04;G02B21/00;H01J37/00;H01J37/20;(IPC1-7):G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|