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发明名称
METHOD OF AND APPARATUS FOR PRODUCING DIAMOND THIN FILMS
摘要
申请公布号
KR940003099(B1)
申请公布日期
1994.04.13
申请号
KR19900000370
申请日期
1990.01.13
申请人
IDEMITSU PETROCHEMICAL CO., LTD.
发明人
HAYASHI, NARIYUKI;ITOH, TOSHIMICHI
分类号
C23C16/27;C23C16/458;C30B25/12;(IPC1-7):C23C16/26
主分类号
C23C16/27
代理机构
代理人
主权项
地址
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