| 摘要 |
PURPOSE:To suppress a temperature drift of an element and to improve a marking performance by equally controlling the temperature of a laser oscillator and a galvanic meter type scanning optical system with the same housing. CONSTITUTION:A scanning optical system 2 has a part housing a X axis galvanic meter type mirror scanning element 12 and a Y axis mirror scanning element 13 and a common temperature controlling part in the housing 31 common with a part of a Nd:YAG laser beam oscillating medium 7, and use pipings 21, 22 of a cooling water system in common. In such a way, the device can be miniaturized, the temperature drift of the scanning element can be suppressed and the marking performance can be improved by integrating the scanning optical system 2 with the laser oscillator 1. |
