| 发明名称 |
CONTRAST ENHANCEMENT LAYER COMPOSITIONS, ALKYLNITRONES, AND USE |
| 摘要 |
CONTRAST ENHANCEMENT LAYER COMPOSITIONS, ALKYLNITRONES, AND USE Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones. |
| 申请公布号 |
CA1327974(C) |
申请公布日期 |
1994.03.22 |
| 申请号 |
CA19880561113 |
申请日期 |
1988.03.10 |
| 申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
WEST, PAUL R.;DAVIS, GARY C.;REGH, KAREN A. |
| 分类号 |
G03F7/095;C07C291/02;G03C1/00;G03C1/73;G03F7/09;G03F7/26;H01L21/027 |
主分类号 |
G03F7/095 |
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