| 摘要 |
PURPOSE:To measure information in a vacuum chamber simply and in time series and to transmit it to the outside of the vacuum chamber by transmitting data measured by a sensor in the vacuum chamber by radio. CONSTITUTION:A substrate 5 to be processed in the vacuum chamber 4 is set on a substrate holder 6 to be processed, and the sensor 3 which measures temperature, processing speed (film thickness, etc.), pressure, and a plasma parameter (floating potential), etc., that are the information is mounted on the substrate 5 to be processed. The information detected by the sensor 3 is converted to radio information by a transmitter connected to the sensor 3 by an electric cable 8 and a sensor information processor 1, and is sent to the outside of the vacuum chamber 4. A receiver and a sensor information processor 2 installed outside the vacuum chamber 4 receive the radio information sent from the transmitter and the sensor information processor 1, and the information detected by the sensor 3 can be obtained. |
