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发明名称
IMPURITY DOPING METHOD AND CARRIER DENSITY CONTROL METHOD BY IMPURITY DOPING
摘要
申请公布号
JPH0669251(A)
申请公布日期
1994.03.11
申请号
JP19910212857
申请日期
1991.07.30
申请人
NEC CORP
发明人
SONE SHUJI
分类号
C30B29/48;H01L21/363;(IPC1-7):H01L21/363
主分类号
C30B29/48
代理机构
代理人
主权项
地址
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