| 摘要 |
PURPOSE:To perform supply and discharge of carrier plates easily and efficiently by laying out multiple polishing devices in a small space. CONSTITUTION:A transferred carrier plate is transported to a position where it is held between a center roller 16 and a guide roller 18 by the rotation of a level block. Next, similarly, multiple polishing devices 12A to 12D which set carrier plates 20 between the center roller 16 and the multiple rollers 18, respectively, from the deeper side of the level block in sequence such as holding the carrier plate 20 between the guide roller 18 positioned second from the deepest section and the center roller 16 are provided in parallel to each other. A transport device 34 for the carrier plates 20 is provided between the transfer position of the first polishing device 12A and each polishing device, and a discharging device 34 to discharge the carrier plates in order from the discharging position of the carrier plates 20 for the polishing device 12D in the lowermost downstream us provided. |
