发明名称 |
Photosensitive polymer composition |
摘要 |
A photosensitive polymer composition comprising, in admixture, a polymer predominantly comprising a recurring unit of the formula (I): (* CHEMICAL STRUCTURE *) (I) wherein x is a tri- or tetravalent organic group, Y is a divalent organic group, and n is equal to 1 or 2 and a compound having a urea bond of the formula (II): (* CHEMICAL STRUCTURE *) (II) wherein R1 is a group having a functional group capable of forming a dimer or polymer upon exposure to radiation, R2 and R3 are independently a hydrogen atom or a monovalent organic group is shelf stable and applicable as relatively thick coatings having sufficient photosensitivity to form semiconductor element surface protective films.
|
申请公布号 |
US5292619(A) |
申请公布日期 |
1994.03.08 |
申请号 |
US19920853683 |
申请日期 |
1992.03.17 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
OKINOSHIMA, HIROSHIGE;KATO, HIDETO |
分类号 |
C08F283/04;C08K5/21;C08L79/08;C09D179/08;G02F1/1337;G03F7/027;G03F7/037;G03F7/038;G03F7/075;H01L21/312;(IPC1-7):G03C1/725 |
主分类号 |
C08F283/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|