发明名称 Photosensitive polymer composition
摘要 A photosensitive polymer composition comprising, in admixture, a polymer predominantly comprising a recurring unit of the formula (I): (* CHEMICAL STRUCTURE *) (I) wherein x is a tri- or tetravalent organic group, Y is a divalent organic group, and n is equal to 1 or 2 and a compound having a urea bond of the formula (II): (* CHEMICAL STRUCTURE *) (II) wherein R1 is a group having a functional group capable of forming a dimer or polymer upon exposure to radiation, R2 and R3 are independently a hydrogen atom or a monovalent organic group is shelf stable and applicable as relatively thick coatings having sufficient photosensitivity to form semiconductor element surface protective films.
申请公布号 US5292619(A) 申请公布日期 1994.03.08
申请号 US19920853683 申请日期 1992.03.17
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 OKINOSHIMA, HIROSHIGE;KATO, HIDETO
分类号 C08F283/04;C08K5/21;C08L79/08;C09D179/08;G02F1/1337;G03F7/027;G03F7/037;G03F7/038;G03F7/075;H01L21/312;(IPC1-7):G03C1/725 主分类号 C08F283/04
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