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发明名称
AC CHARACTERISTIC CHECKING CIRCUIT
摘要
申请公布号
JPH0653418(A)
申请公布日期
1994.02.25
申请号
JP19920200735
申请日期
1992.07.28
申请人
NEC CORP
发明人
KACHI YOSHIO
分类号
G01R31/26;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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