SIMULATION METHOD FOR THREE-DIMENSIONAL LSI SHAPE

摘要

PURPOSE: To obtain a three-dimensional topography simulation tool cancelling the limit of a cumulative parallel sweeping method by caccurately calculating the movement of a vertex. CONSTITUTION: The tool is used for vertex movement calculation when an etching/deposition rate depends oh an angle between a surface normal vector and a vertical direction. A physical solid is boundary model respectively including a vertex, an edge and a surface. First, the edge of a surface and the flat surface of the surface adjacent to a vertex are advanced to clip the advanced edge and the advanced flat surfaces corresponding to it 1446 and 1448 to make a series of two-dimensionally clipped surface. A pair of two-dimensional solutions are combined to fine the intersection part of the two-dimensional solutions. Next an invalid section is identified from this to obtain the set of the series of combined two-dimensional solutions with respect to all the two-dimensional solutions. Next, an optional vertical surface crossing with the solid at the vertex is generated to generate the locus of the vertex within a vertical surface to cut off by the advancing surface.