| 摘要 |
<p>PURPOSE:To provide an operating method by which a trouble in the time of day-to-day operation is prevented in a vacuum treating device including a semiconductor producing device, etc. CONSTITUTION:In an operating method of a vacuum treating device consisting of a vacuum producing device 1, a vacuum pump 2 installed communicatingly with the device and a dry detoxifying device 3, temperature sensors are arranged in one or more of a vacuum pump part 12-1, a dry detoxifying device inlet part 12-2 or outlet part 12-4 and the inside 12-3 of a detoxifying column of the dry detoxifying device. When any of the temperature sensors detects the abnormal temperature rise, process gas 16 flowing in the vacuum producing device is stopped and/or diluting inert gas 14 flows into sucked gas in large quantities.</p> |
