发明名称 MOBILE TABLE
摘要 <p>PURPOSE:To provide a mobile table which possesses a compact shape and permits the rectilinear shift and the revolutional movement. CONSTITUTION:The first table A is supported on the second table B through a thrust bearing, and the second table B is installed on the third table C through the rectilinear guides 5 and 5. A composite coupling 9 for allowing the revolution for the first table A and the slide for the second table B is installed between the side 7a of the first table and the first driving device 10, and the second driving device 22 is connected on the side 7b of the first table A through a slide coupling 20 and a turning coupling 21. The third driving device 30 for driving the first table and the second table along the rectilinear guide 5 is connected on the side of the third table C.</p>
申请公布号 JPH0631563(A) 申请公布日期 1994.02.08
申请号 JP19920189249 申请日期 1992.07.16
申请人 NTN CORP 发明人 MATSUMOTO HIROSHI
分类号 B23Q1/00;B23Q1/32;B23Q1/48;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):B23Q1/14 主分类号 B23Q1/00
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