| 摘要 |
PURPOSE:To provide a high quality pellicle preventing the occurrence of foreign matter and not causing the breaking or exfoliation of the pellicle film at the time of cleaning the pellicle by air blowing. CONSTITUTION:A UV-curing resin compsn. having >=1B surface pencil hardness after curing and/or a UV-curing resin compsn. capable of swelling a pellicle film within 10min to 24hr after dropping when the compsn. is dropped on the pellicle film in an uncured state is used as an adhesive for fixing the pellicle film on a pellicle frame and the objective pellicle is provided. |
