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发明名称
Herstellung von Halbleiterbauelementen unter Verwendung gemusterter Metallschichten.
摘要
申请公布号
DE3787662(T2)
申请公布日期
1994.02.03
申请号
DE19873787662T
申请日期
1987.04.10
申请人
AMERICAN TELEPHONE AND TELEGRAPH CO., NEW YORK, N.Y., US
发明人
HIGASHI, GREGG SUMIO, BASKING RIDGE, NJ 07920, US
分类号
C23C16/06;C23C16/48;C23C20/04;H01L21/285;H01L21/3205;(IPC1-7):C23C16/48
主分类号
C23C16/06
代理机构
代理人
主权项
地址
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