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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0621093(A)
申请公布日期
1994.01.28
申请号
JP19920178344
申请日期
1992.07.06
申请人
HITACHI LTD;HITACHI MICOM SYST:KK
发明人
KOIZUMI KOSHIRO;TAKAHASHI SUSUMU;IKEHARA TAKAKO;GOTO NOBUYUKI
分类号
H01L29/78;H01L21/336;(IPC1-7):H01L21/336;H01L29/784
主分类号
H01L29/78
代理机构
代理人
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