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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH065387(A)
申请公布日期
1994.01.14
申请号
JP19920187369
申请日期
1992.06.23
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
NISHIMURA HIROSHI;ONO TOSHIRO;MATSUO SEITARO
分类号
G01R33/64;G01N24/14;H01L21/31;H05H1/46;(IPC1-7):H05H1/46
主分类号
G01R33/64
代理机构
代理人
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