POSITION DETECTOR AND ELECTRON MICROSCOPE PROVIDED THEREWITH

摘要

PURPOSE:To improve operability of a position detector detecting the deflection of an electron beam to be used for a scanning type transmission electron microscope and the like. CONSTITUTION:Light 4 emitted by a charged particle beam 1 being incident on a scintillator 2 is guided to the outside of a vacuum to be sent to a light guide 6 and a photomultiplier 7 set up outside the vacuum by using an optical lens 5. The light guide 6 and the photomultiplier 7 are integrated into one body and provided with a rotary mechanism 11 and a detector is overall surrounded by a light shield 21. Since the detector is located in the atmospheric pressure, replacement and maintenance work can be extremely easily performed. Further, the direction of the detector can be easily changed by adjusting a deflection direction of an electron beam.