发明名称 |
Vacuum arc deposition device |
摘要 |
A vacuum arc deposition device comprising a vacuum vessel with a vacuum arc evaporation source disposed in the vacuum vessel, a plurality of arc current introduction portions are disposed to the vacuum arc evaporation source along with a plurality of arc discharge power sources for supplying arc electric power correspondingly to the plurality of arc current introduction portions. The vacuum arc vapor deposition device provides a large evaporation area and a high film formation rate.
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申请公布号 |
US5277714(A) |
申请公布日期 |
1994.01.11 |
申请号 |
US19910810375 |
申请日期 |
1991.12.19 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO |
发明人 |
TAMAGAKI, HIROSHI |
分类号 |
C23C14/24;C23C14/32;H01J37/32;(IPC1-7):C23C14/30 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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