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发明名称
CHECKING METHOD OF EXTERNAL APPEARANCE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH063120(A)
申请公布日期
1994.01.11
申请号
JP19920157987
申请日期
1992.06.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIMURA YORIAKI
分类号
G01B11/24;G01N21/84;H01L21/66;H04N7/18;(IPC1-7):G01B11/24
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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