Pyroelectric or thin film bolometer thermal radiation sensor - has photolithographically-structurable layer with infrared absorption characteristics, several microns in thickness on radiation-receiving surface of sensor over silicon@ substrate.

摘要

The structurable lacquer coating (8) contains supplements of fine granular material. The grain size of the material is smaller than the coating thickness of the lacquer coating. The structured lacquer coating (8) is positioned on the front side of the pyroelectric chip (5). A wire contact (7) is arranged at the free remaining part of the front electrode (6). A metallic thin layer working as a reflector is arranged under the structurable lacquer coating, at least on the radiation reception surface. The radiation receiving surface is an absorber layer. ADVANTAGE - Sensor has high sensitivity, and can be mfd. using microelectronic and micro-engineering techniques.