| 摘要 |
A large scale horizontal translation stage (105) for a scanning probe microscope or other instrument is disclosed. The translation stage (105) is provided with air bearings (401, 402, 403) which allow it to float over a planar surface. The translation stage (105) is kinematically mounted on a sample stage guide (219) such that the horizontal position of the translation stage (105) is defined by the sample stage guide (219) but the translation stage is free to move in a direction perpendicular to the planar surface. To position a sample, the air bearings (401, 402, 403) are actuated and the sample stage guide (219) moves the translation stage (105) to a desired position. An attractive force, preferably suction in the air bearings (401, 402, 403), is then applied to hold the translation stage (105) firmly against the supporting surface while the sample (104) is analyzed. This arrangement is particularly suitable for a scanning probe microscope in which a large sample is to be analyzed. |
