| 摘要 |
PURPOSE:To obtain an ion channeling analyzer which can adjust crystal axis without suspending much time in the alignment of crystal axis and without causing irradiation damage or contamination on the surface of a sample. CONSTITUTION:Proton or helium ion from an ion source 1 is accelerated at 1-3MeV and impinges on a sample. A goniometer 6 having at least two axes is disposed in the center of a vacuum tank 5 communicated with the ion source 1. A sample 7 is loaded to the goniometer 6. A white X-ray source 11 and a semiconductor X-ray detector 14 are disposed at predetermined points of the vacuum tank 5. |
