| 摘要 |
PURPOSE:To obviate complication of management of a repair film used at the time of correcting a defect of a mask film, and also, to exactly correct a defect. CONSTITUTION:The device is provided with a means (defect inspecting part) 6 for detecting a defect of a pattern formed on a mask film MF, and a repair film sticking means 7 provided with a hole H (cutter mechanism 73) in a position corresponding to a defect detected by a repair film RF superposed on the mask film MF so as to align and stick this repair film RF to the surface of the mask film (pressure welding roller 74), and with respect to the inspected mask film MF, the repair film RF in which the hole H is opened in the defect corresponding part is stuck, and a defect correction of the inspected mask film MF is facilitated. |
