| 摘要 |
<p>PURPOSE:To detect a foreign object on an inspection surface accurately by positioning an inspection means between the direction where the light reception direction of the inspection means is a regular reflection direction of flux of incidence light on the inspection surface and the inspection surface. CONSTITUTION:An incidence beam 5a scans light in a direction which is nearly vertical to a paper surface while focusing is made on a pattern substrate surface 2a of a reticle 1 with an incidence angle thetai against the reticle 1 or a pellicle surface 3. At this time, the presence or absence of scattered light which is generated from the substrate surface 2a is detected by a light detection means 11, thus judging whether foreign objects such as dirt and dust are adhered on the substrate surface 2 or not. Then, a light reception direction thetad of the means 11 for inspecting the surface 3 is positioned between the reflection angle of a reflection light 5aa when a beam 5a is reflected regularly on the surface 3 and the surface 3, thus preventing the scattered light from surfaces other than those to be inspected from impinging onto the means 11 and detecting the presence or absence of foreign objects which are adhered on the surface to be inspected accurately.</p> |
