MACHINING METHOD FOR PIEZOELECTRIC OBJECT

摘要

PURPOSE:To apply a grooving or cutting treatment to a piezoelectric object in various shapes with high accuracy and without deteriorating the piezoelectric characteristic by irradiating an excimer laser onto the piezoelectric substance. CONSTITUTION:An excimer laser 2 irradiates a piezoelectric object 4 to which an electrode 3 is formed, in an excimer laser machining system 1 having an excimer laser oscillator and an optical system which scans the laser oscillator. Then the system 1 is set under the proper conditions so that a groove 5 or a cut groove is formed in a desired shape.