发明名称 |
SCRUBBER FOR CLEANING SUBSTRATES |
摘要 |
<p>PURPOSE:To provide a durable scrubber which leaves no uncleaned portion or causes no scratch in cleaning a rectangular substrate. CONSTITUTION:A scrubber 3 for cleaning a substrate having a roll 1 provided with cloth 21 and a brush 22. The scrubber 3 cleans an almost rectangular substrate 4 rotating on the axis of the central normal perpendicular to the axis of the roll 1 by contacting the cloth 21 and the brush 22 with the substrate 4. The cloth 21 is implanted in a portion of the roll 1 to be put into contact with the area within the inscribed circle to the substrate 4; the brush 22 is implanted in a portion of the roll 1 to be put into contact with the area outside the inscribed circle to the substrate 4.</p> |
申请公布号 |
JPH05326473(A) |
申请公布日期 |
1993.12.10 |
申请号 |
JP19920130861 |
申请日期 |
1992.05.22 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
GOTO WATARU;MORIKAWA YASUTAKA |
分类号 |
A46B7/10;B08B1/04;G03F1/82;H01L21/304;(IPC1-7):H01L21/304;G03F1/08 |
主分类号 |
A46B7/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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