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发明名称
FORMING METHOD OF CONTACT WINDOW
摘要
申请公布号
KR930011432(B1)
申请公布日期
1993.12.06
申请号
KR19910007422
申请日期
1991.05.08
申请人
TOSHIBA CO., LTD.
发明人
HARAGUCHI, HIROSHI;TSUJI, HITOSHI;YOSHIDA, YASUHISA
分类号
G03F7/20;H01L21/027;H01L21/30;H01L21/768;(IPC1-7):H01L21/28
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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