摘要 |
PURPOSE:To make easy the handling of sample mounting, by eliminating the need for replacement of a whole sample stage by mounting and dismounting a rotary table on the sample stage and constituting the sample stage with a scanning electron microscope and an X-ray microanalyzer. CONSTITUTION:When a sample 19 to be observed through a sample holder 18 is mounted in a hole 10 of a body of rotation 5, the sample 19 can rotate on its own optical axis and be used as a scanning electron microscope sample stage by actuating a pickup device 17. Subsequently, by removing the sample holder 18 from the body of rotation 5 and mounting a rotary table in a hole 11 of a body of rotation 6, a number of samples to be analyzed can be retained on a moving body and the sampler can be used as an X-ray microanalizer sample stage. |