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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05315320(A)
申请公布日期
1993.11.26
申请号
JP19920120312
申请日期
1992.05.13
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
UENISHI TOSHIYA;SUZUKI NORIO;KOSAKA YUJI;NAKAMURA ATSUSHI;SATO TOMOMI
分类号
H01L21/76;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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